Microelectromechanical systems Wikipedia
2019627 ensp 0183 enspMicroelectromechanical systems MEMS also written as microelectromechanical MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics and microsystems is the technology of microscopic devices particularly those with moving parts It merges at the nanoscale into nanoelectromechanical systems NEMS and